#contact RS, non-contact RS, backside ITO, metal
Measurement range: 10^-4 ~ 10^7Ω(normal), 10^3 ~ 10^14Ω(high)
Measurement mode:contact / non-contact
Reproducibility: CV < 1.5%
Ω, Ω/□, Ω•cm, S/cm
> Non-contact measurement
> Low resistance measurement
> High resistance measurement
Conductive materials e.g. paint, ink, paste plastic, Si wafer, etc.
Conductive films e.g. ITO glass, evaporated metal, sprayed metal, ceramics, etc.
High resistance materials for LTPS fabrication e.g. a-Si, poly Si, etc.